Tegema has been a supplier to the semiconductor industry for more than 30 years and works for a wide range of customers. We mainly function as a system, module and tooling supplier. We take care of the complete design and engineering as well as the production and installation. We are experts in design for manufacturing and we are able to produce cost effectively. This is not only based on our technological know-how and internal capabilities, but also on our knowledge of different markets, the supply chain and supporting processes.
Our experts have practical experience in production and are the best in their field.
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The goal of this project was the realisation of a 200 mm wafer UV curing and erase system. UV curing is applied to cure the photo-resistance present on wafers, which provides improved results in successive processes. The erase process is applied to clear all memory components in the wafer. TEGEMA supported Trymax with the realisation of the first prototype system. TEGEMA managed all CAD-related activities, including the design of the process chambers and the service mechanism of the UV module. TEGEMA also delivered a complete TPD package for Trymax so they could deliver and launch the system on the market.
In this project a qualification tool for a Beam Steering Unit was developed by Tegema to reduce the amount of rejected parts after assembly. The Tool was used in a cleanroom production environment, so ease of use was an important requirement. Also, the calibration of the tool was included in the design and the required measurement accuracy was ±4 µm. The tool was developed from concept till end product consisting of hardware, electronics and software. The tested hardware was delivered to the customer (GL) together with the TPD.
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